Semiconductor device with air gap and method for fabricating the same

ABSTRACT

A semiconductor device includes a dielectric structure which has an opening exposing a surface of a substrate; and a conductive structure which is formed in the opening, wherein the conductive structure comprises: a first conductive pattern recessed in the opening; a second conductive pattern covering a top surface and sidewalls of the first conductive pattern; an air gap defined between sidewalls of the opening and the second conductive pattern; and a third conductive pattern capping the second conductive pattern and the air gap.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application claims priority of Korean Patent Application No.10-2013-0081885, filed on Jul. 12, 2013, which is incorporated herein byreference in its entirety.

BACKGROUND

1. Field

Exemplary embodiments of the present invention relate to a semiconductordevice, and more particularly, to a semiconductor device with air gapsand a method for fabricating the same.

2. Description of the Related Art

In general, in a semiconductor device, a dielectric material is formedbetween adjacent conductive structures. As a semiconductor device ishighly integrated, a distance between conductive structures is graduallydecreasing, thus, parasitic capacitance increases. As parasiticcapacitance increases, the performance of the semiconductor device isdegraded.

To reduce parasitic capacitance, the dielectric constant of a dielectricmaterial may be decreased. However, since the dielectric material has ahigh dielectric constant, limitations may exist in reducing parasiticcapacitance.

SUMMARY

Various exemplary embodiments are directed to a semiconductor devicecapable of reducing the parasitic capacitance between adjacentconductive structures, and a method for fabricating the same.

In an exemplary embodiment, a semiconductor device may include: adielectric structure which has an opening exposing a surface of asubstrate; and a conductive structure which is formed in the opening,wherein the conductive structure comprises: a first conductive patternrecessed in the opening; a second conductive pattern covering a topsurface and sidewalls of the first conductive pattern; an air gapdefined between sidewalls of the opening and the second conductivepattern; and a third conductive pattern capping the second conductivepattern and the air gap.

In an exemplary embodiment, a semiconductor device may include: adielectric structure which has an opening exposing a surface of asubstrate; and a conductive structure which is formed in the opening,wherein the conductive structure comprises: a first conductive patternrecessed in the opening and including metal silicide; an air gap definedbetween sidewalls of the opening and the first conductive pattern; and asecond conductive pattern capping the first conductive pattern and theair gap.

In an exemplary embodiment, a semiconductor device may include: aplurality of conductive structures including first conductive patternswhich are formed over a substrate; second conductive patterns recessedbetween the conductive structures; third conductive patterns coveringtop surfaces and sidewalls of the second conductive patterns; air gapsdefined between the first conductive patterns and the third conductivepatterns; and fourth conductive patterns capping the air gaps and thethird conductive patterns.

In an exemplary embodiment, a semiconductor device may include: aplurality of bit line structures including bit lines which are formedover a substrate; first plugs recessed between the bit line structuresand including metal silicide; air gaps defined between the first plugsand the bit line structures; and second plugs capping the air gaps andthe first plugs.

In an exemplary embodiment, a method for fabricating a semiconductordevice may include: forming a plurality of conductive structuresincluding first conductive patterns over a substrate; forming adielectric layer over the conductive structures; etching the dielectriclayer to define openings between the conductive structures; formingsacrificial spacers over sidewalls of the openings; forming secondconductive patterns recessed in the openings over the sacrificialspacers; removing the sacrificial spacers to define air gaps; formingthird conductive patterns which are separated from the first conductivepatterns by the air gaps and cover sidewalls and top surfaces of thesecond conductive patterns; and forming fourth conductive patterns whichcap the air gaps over the third conductive patterns.

In an exemplary embodiment, a method for fabricating a semiconductordevice may include: forming a plurality of conductive structuresincluding first conductive patterns over a substrate; forming adielectric layer over the conductive structures; etching the dielectriclayer to define openings between the conductive structures; formingsacrificial spacers over sidewalls of the openings; forming secondconductive patterns recessed in the openings over the sacrificialspacers, the second conductive patterns including metal silicide;removing the sacrificial spacers to define air gaps; and forming thirdconductive patterns which cap the air gaps over the second conductivepatterns.

In an exemplary embodiment, a method for fabricating a semiconductordevice may include: forming a plurality of bit line structures includingbit lines over a substrate; forming a dielectric layer over the bit linestructures; etching the dielectric layer to define contact holes betweenthe bit line structures; forming sacrificial spacers over sidewalls ofthe contact holes; forming silicon plugs recessed in the contact holesover the sacrificial spacers; removing the sacrificial spacers to defineair gaps; forming ohmic contact layers which are separated from the bitlines by the air gaps that cover sidewalls and top surfaces of thesilicon plugs; and forming metal plugs which cap the air gaps over theohmic contact layer.

In an exemplary embodiment, a method for fabricating a semiconductordevice may include: forming a plurality of bit line structures includingbit lines over a substrate; forming a dielectric layer over the bit linestructures; etching the dielectric layer to define openings between thebit line structures; forming sacrificial spacers over sidewalls of theopenings; forming silicide plugs recessed in the openings over thesacrificial spacers; removing the sacrificial spacers to define airgaps; and forming metal plugs which cap the air gaps over the silicideplugs.

In an exemplary embodiment, a method for fabricating a semiconductordevice may include: forming isolation regions in a substrate whichisolate first regions and second regions from each other; forming bitline structures and gate structures in the first regions and the secondregions, respectively; forming a dielectric layer over the bit linestructures; etching the dielectric layer to define contact holes betweenthe bit line structures; forming sacrificial spacers over sidewalls ofthe contact holes; forming silicon plugs recessed in the contact holesover the sacrificial spacers; removing the sacrificial spacers to defineair gaps; forming ohmic contact layers which are separated from the bitline structures by the air gaps that cover sidewalls and top surface ofthe silicon plugs; forming metal plugs which cap the air gaps over theohmic contact layer; and forming capacitors over the metal plugs.

In accordance with the above embodiments, since air gaps are definedbetween conductive structures, parasitic capacitance (Cb) may bereduced.

Additionally, since conductive structures include a silicide layer, thesheet resistance (Rs) of the conductive structures may be reduced. Inparticular, since a low resistance silicide layer is included, the sheetresistance (Rs) of the conductive structures may be further reduced. Asthe sheet resistance (Rs) is reduced, a contact resistance (Rc) may beimproved.

Further, since a contact area increases as an ohmic contact layer coversa silicon plug, the contact resistance (Rc) of the conductive structuresmay be further improved. Moreover, it is possible to cap the air gapsusing a conductive material without using a dielectric material. As aconsequence, a parasitic capacitance (Cb) may be reduced due to the airgaps, a sheet resistance (Rs) may be reduced by the low resistancesilicide layer, and the contact resistance (Rc) of the conductivestructures may be improved attributable to an increase in contact area.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A is a cross-sectional view illustrating a semiconductor device inaccordance with a first embodiment;

FIG. 1B is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the first embodiment;

FIG. 1C is a cross-sectional view illustrating a semiconductor device inaccordance with a second embodiment;

FIG. 1D is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the second embodiment;

FIGS. 2A to 2G are cross-sectional views illustrating an exemplarymethod for fabricating the semiconductor device in accordance with thefirst embodiment;

FIGS. 2H and 2I are cross-sectional views illustrating an exemplarymethod for fabricating the semiconductor device in accordance with thesecond embodiment;

FIGS. 3A and 3B illustrate comparative examples of resistances accordingto a position of conductive structures;

FIGS. 4A and 4B are cross-sectional views illustrating an exemplarymethod for capping an air gap in the semiconductor device in accordancewith the first embodiment;

FIGS. 5A and 5B are cross-sectional views illustrating another exemplarymethod for capping an air gap in the semiconductor device in accordancewith the first embodiment;

FIG. 6A is a cross-sectional view illustrating a semiconductor device inaccordance with a third embodiment;

FIG. 6B is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the third embodiment;

FIG. 6C is a cross-sectional view illustrating a semiconductor device inaccordance with a fourth embodiment;

FIG. 6D is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the fourth embodiment;

FIGS. 7A to 7I are cross-sectional views illustrating an exemplarymethod for fabricating the semiconductor device in accordance with thethird embodiment;

FIG. 8 is a cross-sectional view illustrating an exemplary method forcapping air gaps in the semiconductor device in accordance with thethird embodiment;

FIG. 9 is a cross-sectional view illustrating another exemplary methodfor capping air gaps in the semiconductor device in accordance with thethird embodiment;

FIG. 10A is a cross-sectional view illustrating exemplary memory cellsof a semiconductor device;

FIG. 10B is a plan view taken along the line A-A′ of FIG. 10A;

FIG. 10C is a cross-sectional view taken along the line B-B′ of FIG.10B;

FIG. 11 is a cross-sectional view illustrating a modification of theexemplary memory cells of FIG. 10A;

FIGS. 12A to 12I are cross-sectional views illustrating an exemplarymethod for fabricating the exemplary memory cells of FIG. 10A;

FIG. 13 is a schematic diagram illustrating an exemplary memory card;and

FIG. 14 is a block diagram illustrating an exemplary electronic system.

DETAILED DESCRIPTION

Various exemplary embodiments will be described below in more detailwith reference to the accompanying drawings. The present invention may,however, be embodied in different forms and should not be construed aslimited to the embodiments set forth herein. Rather, these embodimentsare provided so that this disclosure will be thorough and complete, andwill fully convey the scope of the present invention to those skilled inthe art. Throughout the disclosure, like reference numerals refer tolike parts throughout the various figures and embodiments of the presentinvention.

The drawings are not necessarily to scale and in some instances,proportions may have been exaggerated in order to clearly illustratefeatures of the embodiments. It should be readily understood that themeaning of “on” and “over” in the present disclosure should beinterpreted in the broadest manner such that “on” means not only“directly on” but also “on” something with an intermediate feature(s) ora layer(s) in between, and that “over” means not only directly on topbut also on top of something with an intermediate feature(s) or alayer(s) in between. It is also noted that in this specification,“connected/coupled” refers to one component not only directly couplinganother component but also indirectly coupling another component throughan intermediate component. In addition, a singular form may include aplural form as long as it is not specifically mentioned in a sentence.

FIG. 1A is a cross-sectional view illustrating a semiconductor device inaccordance with a first embodiment.

Referring to FIG. 1A, a dielectric layer 102 is formed on a substrate101. An opening 103 is defined in the dielectric layer 102 to expose thesurface of the substrate 101. A conductive structure 105 is formed inthe opening 103. The conductive structure 105 includes a firstconductive pattern 106 and a third conductive pattern 110. The thirdconductive pattern 110 is formed over the first conductive pattern 106.A second conductive pattern 107 is formed between the first conductivepattern 106 and the third conductive pattern 110. The second conductivepattern 107 covers the top surface and the sidewalls of the firstconductive pattern 106. A barrier pattern 108 and a glue pattern 109 areformed between the second conductive pattern 107 and the thirdconductive pattern 110. An air gap 111 is defined between the secondconductive pattern 107 and the sidewalls of the opening 103. The barrierpattern 108 caps the air gap 111 and covers the top surface of thesecond conductive pattern 107. A spacer 104 may be formed on thesidewalls of the opening 103.

The substrate 101 includes a silicon substrate, a silicon-germaniumsubstrate, or a silicon-on-insulator (SOI) substrate. The dielectriclayer 102 includes a low-k material. The dielectric layer 102 mayinclude silicon nitride or silicon oxide. The dielectric layer 102serves as an interlayer dielectric layer.

The opening 103 may have a hole shape or a line shape. For example, theopening 103 includes a contact hole, a via hole, a through hole, atrench, a recess, or the like. When the opening 103 is a contact hole,the conductive structure 105 becomes a contact plug.

Each of the first conductive pattern 106 and the third conductivepattern 110 includes a silicon-containing material or a metal-containingmaterial. The first conductive pattern 106 and the third conductivepattern 110 may include the same conductive material or differentconductive materials. For example, the first conductive pattern 106includes a silicon-containing material, and the third conductive pattern110 includes a metal-containing material. The first conductive pattern106 may include polysilicon, and the third conductive pattern 110 mayinclude tungsten. When the silicon-containing material and themetal-containing material contact each other, an ohmic contact isrequired. For such an ohmic contact, the second conductive pattern 107is formed.

The second conductive pattern 107 covers the top surface and thesidewalls of the first conductive pattern 106. The second conductivepattern 107 includes silicide. The second conductive pattern 107 mayinclude metal silicide. The second conductive pattern 107 may includetitanium silicide, cobalt silicide, nickel silicide or tungstensilicide. In the exemplary embodiment, the second conductive pattern 107includes cobalt silicide. The second conductive pattern 107 includescobalt silicide with a phase of CoSi₂.

The spacer 104 includes a low-k material. The low-k material includesoxide or nitride. The low-k material may include silicon oxide, siliconnitride or metal oxide. The spacer 104 includes SiO₂, Si₃N₄ or SiN. Thespacer 104 may be omitted.

The air gap 111 may be defined by removing a sacrificial material formedbetween the spacer 104 and the second conductive pattern 107.

The barrier pattern 108 covers the top surface and the sidewalls of anupper portion of the second conductive pattern 107 and caps the air gap111. Further, the barrier pattern 108 covers the sidewalls of theopening 103 over the air gap 111. The barrier pattern 108 does not fillthe air gap 111 but caps the air gap 111. The barrier pattern 108includes a metal-containing material. The barrier pattern 108 mayinclude titanium.

The glue pattern 109 includes a metal-containing material. The gluepattern 109 may include titanium nitride (TiN).

FIG. 1B is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the first embodiment. In FIGS. 1A and1B, like reference numerals are used to refer to the same elements.

Referring to FIG. 1B, unlike FIG. 1A, the air gap 111 and the secondconductive pattern 107 are capped by a third conductive pattern 110Bwithout the barrier pattern 108 and the glue pattern 109 of FIG. 1A. Aconductive structure 105B becomes a stack structure of the firstconductive pattern 106, the second conductive pattern 107, and the thirdconductive pattern 110.

In FIGS. 1A and 1B, the conductive structure 105 and 105B may become aplug structure. The first conductive pattern 106 includes a siliconplug. The third conductive pattern 110 and 110B includes a metal plug.The second conductive pattern 107 serves as an ohmic contact layerbetween the silicon plug and the metal plug. The conductive structure105 and 105B including the silicon plug and the metal plug may bereferred to as a semi-metal plug (SMP).

FIG. 1C is a cross-sectional view illustrating a semiconductor device inaccordance with a second embodiment.

Referring to FIG. 1C, a dielectric layer 122 is formed on a substrate121. An opening 123 is defined in the dielectric layer 122 to expose thesurface of the substrate 121. A conductive structure 125 is formed inthe opening 123. The conductive structure 125 includes a firstconductive pattern 126 and a second conductive pattern 129. The secondconductive pattern 129 is formed over the first conductive pattern 126.A barrier pattern 127 and a glue pattern 128 are formed between thefirst conductive pattern 126 and the second conductive pattern 129. Anair gap 130 is defined between the first conductive pattern 126 and thesidewalls of the opening 123. The barrier pattern 127 caps the air gap130 and covers the top surface and the sidewalls of an upper portion ofthe first conductive pattern 126. A spacer 124 may be formed on thesidewalls of the opening 123.

The first conductive pattern 126 includes silicide. The first conductivepattern 126 may include metal silicide. The first conductive pattern 126includes metal silicide which is formed by deposition. The metalsilicide may be formed by chemical vapor deposition (CVD). The firstconductive pattern 126 may also be formed by a fully-silicidationprocess. The first conductive pattern 126 may include titanium silicide,cobalt silicide, nickel silicide, or tungsten silicide. In the exemplaryembodiment, the first conductive pattern 126 includes cobalt silicide.The first conductive pattern 126 includes cobalt silicide with the phaseof CoSi₂.

FIG. 1D is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the second embodiment. In FIGS. 1C and1D, like reference numerals are used to refer to the same elements.

Referring to FIG. 1D, unlike FIG. 1C, the air gap 130 and the firstconductive pattern 126 are capped by a second conductive pattern 129Dwithout the barrier pattern 127 and the glue pattern 128 of FIG. 1C. Aconductive structure 125D becomes a stack structure of the firstconductive pattern 126 and the second conductive pattern 129.

In FIGS. 1C and 1D, the conductive structure 125 and 125D may become aplug structure. The first conductive pattern 126 includes a siliconplug. The second conductive pattern 129 includes a metal plug. Theconductive structure 125 including the silicon plug and the metal plugmay be referred to as a metal-base plug.

In FIGS. 1A to 1D, each of the conductive structures 105, 105B, 125, and125D may include a bit line, a metal line, a gate electrode, a wordline, a through electrode, or the like.

While not shown, a transistor which includes a gate electrode formed onthe substrate 101 and 121, and a source region and a drain region formedin the substrate 101 and 121 may be formed. Each of the conductivestructures 105, 105B, 125, and 125D may be connected to the sourceregion or the drain region of the transistor. The transistor may includea planar gate type transistor, a trench gate type transistor, a buriedgate type transistor, a recess gate type transistor, or a verticalchannel transistor. An additional conductive structure may be formed oneach of the conductive structures 105, 105B, 125, and 125D. Theadditional conductive structure may include a metal line or a memoryelement. The memory element may include a capacitor which is comprisedof a storage node, a dielectric layer, and a plate node. The storagenode may be electrically connected onto each of the conductivestructures 105, 105B, 125, and 125D. The memory element may beconstructed in a variety of ways. For example, the memory element mayinclude a resistance variable material. The memory element may include afirst electrode, a resistance variable material and a second electrodewhich are sequentially stacked, and the first electrode may beelectrically connected to each of the conductive structures 105, 105B,125, and 125D. Data may be stored by using the fact that the resistanceof the resistance variable material is changed according to the voltagesapplied to the first electrode and the second electrode. The resistancevariable material may include a phase change material or a magnetictunnel junction.

FIGS. 2A to 2G are cross-sectional views illustrating an exemplarymethod for fabricating the semiconductor device in accordance with thefirst embodiment.

Referring to FIG. 2A, a first dielectric layer 12 is formed on asubstrate 11. The substrate 11 includes a semiconductor substrate. Thesubstrate 11 may include a silicon substrate, a silicon germaniumsubstrate, or an SOI substrate. The first dielectric layer 12 includes alow-k material. The first dielectric layer 12 may include siliconnitride or silicon oxide.

By etching the first dielectric layer 12, an opening 13 is defined inthe first dielectric layer 12 to expose the surface of the substrate 11.The opening 13 has a hole shape or a line shape. The opening 13 mayinclude a contact hole, a via hole, a through hole, a trench, a recess,or the like. A plurality of openings 13 may be formed in the firstdielectric layer 12 at regular intervals to define an opening array. Inorder to etch the first dielectric layer 12, a mask pattern (not shown)may be used. The mask pattern includes a photoresist pattern or a hardmask pattern that is patterned using a photoresist pattern. The surfaceof the substrate 11 which is exposed by the opening 13 may include animpurity region.

A second dielectric layer 14A is formed. The second dielectric layer 14Ais formed over the first dielectric layer 12 including the opening 13.The second dielectric layer 14A is a material to be a liner or spacer.The second dielectric layer 14A is conformally formed with a thinthickness that does not fill the opening 13. The second dielectric layer14A includes a low-k material. The second dielectric layer 14A mayinclude silicon nitride or silicon oxide. For example, the firstdielectric layer 12 may include silicon oxide, and the second dielectriclayer 14A may include silicon nitride. In an alternative embodiment, thesecond dielectric layer 14A may be omitted.

A sacrificial layer 15A is formed on the second dielectric layer 14A.The sacrificial layer 15A is conformally formed on the second dielectriclayer 14A with a thin thickness that does not fill the opening 13. Thesacrificial layer 15A includes a material which may be removed by wetetching. The sacrificial layer 15A may include a material different fromthe first dielectric layer 12 and the second dielectric layer 14A. Thesacrificial layer 15A includes metal nitride. The sacrificial layer 15Amay include titanium nitride (TiN).

Referring to FIG. 2B, a spacer 14 and a sacrificial spacer 15 are formedon the sidewalls of the opening 13. The sacrificial spacer 15 is formedby etching the sacrificial layer 15A. The spacer 14 is formed by etchingthe second dielectric layer 14A. In order to form the spacer 14 and thesacrificial spacer 15, an etch-back process may be performed. Thesurface of the substrate 11 is exposed on the bottom of the opening 13by forming the spacer 14 and the sacrificial spacer 15.

Referring to FIG. 2C, a first conductive pattern 16A is formed. Thefirst conductive pattern 16A is formed in such a way as to be recessedin the opening 13. In detail, a first conductive layer (not shown) isformed over the first dielectric layer 12 including the sacrificialspacer 15 to fill the opening 13. By selectively removing the firstconductive layer, the first conductive pattern 16A is formed in theopening 13. In order to form the first conductive pattern 16A, the firstconductive layer may be etched by an etch-back process. The firstconductive pattern 16A includes a silicidable material. The firstconductive pattern 16A may include a silicon-containing layer. The firstconductive pattern 16A may include polysilicon. The first conductivepattern 16A contacts the surface of the substrate 11. The firstconductive pattern 16A is recessed to have a height that is lower thanthe top surface of the first dielectric layer 12. An upper portion ofthe sacrificial spacer 15 is exposed by forming the first conductivepattern 16A.

Referring to FIG. 2D, the sacrificial spacer 15 are removed. In order toremove the sacrificial spacer 15, a strip process is performed. Thestrip process may include a cleaning process. The cleaning process usesa wet chemical capable of removing the sacrificial spacer 15.

After the sacrificial spacer 15 is removed by the strip process, spacesoccupied by the sacrificial spacer 15 remain as an air gap 17. The airgap 17 is defined between the first conductive pattern 16A and thesidewalls of the opening 13. Accordingly, a dielectric structureconstituted by the air gap 17 and the spacer 14 is formed between thefirst conductive pattern 16A and the sidewalls of the opening 13. Whenthe spacer 14 is omitted, a dielectric structure constituted by the airgap 17 is formed between the first conductive pattern 16A and thesidewalls of the opening 13.

Referring to FIG. 2E, a silicidable layer 18 is formed. The silicidablelayer 18 is formed over the entire surface of the resultant structurewhile covering the first conductive pattern 16A. The silicidable layer18 is formed on the top surface and the sidewalls of the firstconductive pattern 16A, which are exposed due to the air gap 17. Thesilicidable layer 18 may gap-fill in the air gap 17. The silicidablelayer 18 includes a material capable of forming silicide on the topsurface and the sidewalls of the first conductive pattern 16A. Thesilicidable layer 18 includes a silicidable metal. For example, thesilicidable metal may include titanium, cobalt, tungsten or nickel. Thesilicidable layer 18 may be formed by CVD. Accordingly, the silicidablelayer 18 is formed with a uniform thickness on the top surface and thesidewalls of the first conductive pattern 16A. The silicidable metalsare all conductive materials.

Hereinafter, in the exemplary embodiment, the silicidable layer 18includes cobalt.

A capping layer 19 is formed on the silicidable layer 18. The cappinglayer 19 is conformally formed. The capping layer 19 prevents a silicidelayer to be subsequently formed, from being attacked. The capping layer19 is formed by atomic layer deposition (ALD). The capping layer 19includes metal nitride. The capping layer 19 includes atitanium-containing material. The capping layer 19 may include titaniumnitride. The capping layer 19 may be formed by stacking titanium andtitanium nitride. The capping layer 19 may be formed in the air gap 17or may not be formed in the air gap 17. For example, when thesilicidable layer 18 is formed without gap-filling the air gap 17, thecapping layer 19 may be formed in the air gap 17. In the case when thesilicidable layer 18 is formed to gap-fill the air gap 17, the cappinglayer 19 is not formed in the air gap 17.

According to the above descriptions, the silicidable layer 18 is formedto cover the top surface and the sidewalls of the first conductivepattern 16A. Therefore, because the contact area between the firstconductive pattern 16A and the silicidable layer 18 increases, an areafor forming a silicide layer to be subsequently formed increases.

Referring to FIG. 2F, a second conductive pattern 20 is formed. In orderto form the second conductive pattern 20, a thermal process may beperformed. The thermal process includes an annealing process 21. Theannealing process 21 is performed to make the first conductive pattern16A and the silicidable layer 18 react with each other. Elaborating onthis, a silicidation reaction occurs along the interface where the firstconductive pattern 16A and the silicidable layer 18 contact each other.Accordingly, a silicide layer is formed. The silicide layer becomes thesecond conductive pattern 20. The second conductive pattern 20 serves asan ohmic contact layer. The annealing process 21 may be performed at atemperature of at least 200° C. The annealing process 21 includes arapid thermal annealing (RTA) process.

As the annealing process 21 is performed, the silicon of the firstconductive pattern 16A and the metal of the silicidable layer 18 reactwith each other, and a metal silicide layer is formed. The metalsilicide layer may include titanium silicide, cobalt silicide, nickelsilicide, or tungsten silicide. Since the first conductive pattern 16Aincludes polysilicon and the silicidable layer 18 includes cobalt, acobalt silicide layer is formed by the annealing process 21.

For example, in order to form the cobalt silicide layer, the annealingprocess 21 may be performed twice. By a primary annealing process,cobalt silicide with a phase of CoSi_(x) (x=0.1˜1.5) is formed. Asecondary annealing process is performed after the primary annealingprocess. The secondary annealing process may be performed at atemperature higher than the primary annealing process. The secondaryannealing process is performed at a temperature ranging fromapproximately 600° C. to approximately 800° C. A phase change of thecobalt silicide layer occurs by the secondary annealing process. Forexample, a phase change to cobalt silicide with the phase of CoSi₂occurs by the secondary annealing process. The resistivity of the cobaltsilicide with the phase of CoSi₂ is lower than the cobalt silicide withthe phase of CoSi_(x) (x=0.1˜1.5). By forming the cobalt silicide withthe phase of CoSi₂, contact resistance may be reduced, and at the sametime, it is possible to form cobalt silicide with a lower resistanceeven in the small area of the opening 13 with a fine line width. Thesecondary annealing process may be performed after removing an unreactedsilicidable layer 18A.

Because the second conductive pattern 20 is formed by consuming thesilicon of the first conductive pattern 16A, the first conductivepattern 16A may be reduced in its volume as indicated by the referencenumeral ‘16’. After the annealing process 21, the first conductivepattern 16 is covered by the second conductive pattern 20.

As described above, the second conductive pattern 20 which covers thetop surface and the sidewalls of the first conductive pattern 16 isformed by the annealing process 21. The second conductive pattern 20serves as an ohmic contact layer between the first conductive pattern 16and a third conductive pattern to be subsequently formed.

The unreacted silicidable layer 18A may remain on the second conductivepattern 20.

Referring to FIG. 2G, the unreacted silicidable layer 18A and thecapping layer 19 are removed. In order to remove the unreactedsilicidable layer 18A and the capping layer 19, a strip process isperformed. The strip process includes a cleaning process using a wetchemical.

By the strip process, the unreacted silicidable layer 18A is removed,and the air gap 17 is opened again. The volumes of the air gap 17 may beidentical to or smaller than the initially defined air gap 17.

FIGS. 2H and 2I are cross-sectional views showing an exemplary methodfor fabricating the semiconductor device in accordance with the secondembodiment. In FIGS. 2B and 2I, like reference numerals are used torefer to the same elements.

Referring to FIG. 2H, in a state that the spacer 14 and the sacrificialspacer 15 are formed on the sidewalls of the opening 13 as shown in FIG.2B, a first conductive pattern 16C is formed in such a way as to berecessed in the opening 13. A first conductive pattern 16C may be formedby depositing and etching back a first conducive layer (not shown). Thefirst conductive pattern 16C includes metal silicide. The firstconductive pattern 16C may include titanium silicide, cobalt silicide,nickel silicide, or tungsten silicide. The first conductive layer isformed by CVD. In the exemplary embodiment, the first conductive pattern16C includes cobalt silicide. The cobalt silicide includes cobaltsilicide with the phase of CoSi₂. The first conductive pattern 16Ccontacts the surface of the substrate 11. The first conductive pattern16C has a recessed surface lower than the top surface of the firstdielectric layer 12. By forming the first conductive pattern 16C bydepositing metal silicide, an annealing process and a strip process maybe omitted.

Referring to FIG. 2I, the sacrificial spacer 15 is removed. Thesacrificial spacer 15 is removed by a strip process, and spaces occupiedby the sacrificial spacer 15 remain as the air gap 17.

The air gap 17 is defined between the first conductive pattern 16C andthe sidewalls of the opening 13.

The first conductive pattern 16C according to the second embodiment maybe formed by performing a fully-silicidation process when performing theannealing process 21 in FIG. 2F.

FIGS. 3A and 3B illustrate comparative examples of resistances accordingto a position of conductive structures. FIG. 3B illustrates the case inwhich the second conductive pattern 20 is formed to cover the topsurface and the sidewalls of the first conductive pattern 16, inaccordance with the first embodiment. FIG. 3A illustrates the case inwhich the second conductive pattern 20 is formed to cover only the topsurface of the first conductive pattern 16.

Referring to FIG. 3B, by forming the second conductive pattern 20 tocover the top surface and the sidewalls of the first conductive pattern16, the resistance of a conductive structure may be reduced by theparallel resistance law. Accordingly, the exemplary embodiments of thepresent invention may reduce the resistance of the conductive structure.

FIGS. 4A and 4B are cross-sectional views illustrating an exemplarymethod for capping the air gap in the semiconductor device in accordancewith the first embodiment. In FIG. 2G and FIGS. 4A and 4B, likereference numerals are used to refer to the same elements.

Referring to FIG. 4A, a conductive layer 23A is formed. The conductivelayer 23A is formed over the entire surface of the resultant structureshown in FIG. 2G. The air gap 17 is capped by the conductive layer 23A.Since the spaces of the air gap 17 are narrow, the air gap 17 may not befilled but be capped when forming the conductive layer 23A. Theconductive layer 23A is formed to fill the remainder of the opening 13on the second conductive pattern 20. Further, the conductive layer 23Amay cover the top surface and the sidewalls of an upper portion of thesecond conductive pattern 20. The conductive layer 23A may include ametal-containing layer. The conductive layer 23A may include a tungstenlayer.

Referring to FIG. 48, a third conductive pattern 23 is formed. In orderto form the third conductive pattern 23, the conductive layer 23A may beselectively removed by an etch-back process or a chemical mechanicalpolishing (CMP) process.

Accordingly, a conductive structure 24 including the first conductivepattern 16, the second conductive pattern 20, and the third conductivepattern 23 is formed in the opening 13. The air gap 17 is definedbetween the conductive structure 24 and the sidewalls of the opening 13.The second conductive pattern 20 forms an ohmic contact between thefirst conductive pattern 16 and the third conductive pattern 23. The airgap 17 is defined between the second conductive pattern 20 and thesidewalls of the opening 13. A dielectric structure including the airgap 17 and the spacer 14 is formed between the conductive structure 24and the sidewalls of the opening 13.

FIGS. 5A and 5B are cross-sectional views showing another exemplarymethod for capping the air gap in the semiconductor device in accordancewith the first embodiment. In FIG. 2G and FIGS. 5A and 5B, likereference numerals are used to refer to the same elements.

Referring to FIG. 5A, a barrier layer 25A is formed. The barrier layer25A is formed over the entire surface of the resultant structure shownin FIG. 2G. The barrier layer 25A is conformally formed with a thinthickness that does not fill the opening 13. The barrier layer 25Aincludes a conductive material. The barrier layer 25A caps the air gap17. When forming the barrier layer 25A, a thickness is controlled not tofill but to cap the air gap 17. For example, the barrier layer 25A isformed by physical vapor deposition (PVD). By using PVD, the barrierlayer 25A may be formed without filling the air gap 17. Also, by usingPVD, the barrier layer 25A may be formed to remove native oxide whichremains on the surface of the second conductive pattern 20. The barrierlayer 25A may cover the top surface and the sidewalls of an upperportion of the second conductive pattern 20. Accordingly, as the contactarea between the barrier layer 25A and the second conductive pattern 20increases, contact resistance may be reduced. The barrier layer 25Aincludes a titanium-containing layer. The barrier layer 25A includestitanium.

By forming the barrier layer 25A, it is possible to cap the air gap 17without filling the insides of the air gap 17.

A glue layer 26A is formed on the barrier layer 25A. The glue layer 26Aincludes a conductive material. The glue layer 26A includes atitanium-containing layer. The glue layer 26A may include titaniumnitride (TiN). The glue layer 26A is formed by CVD.

A third conductive layer 27A is formed. The third conductive layer 27Afills the remainder of the opening 13 on the glue layer 26A. The thirdconductive layer 27A may include a metal-containing layer. The thirdconductive layer 27A may include a tungsten layer. The third conductivelayer 27A is formed by CVD.

Referring to FIG. 5B, a third conductive pattern 27 is formed. The thirdconductive pattern 27 is formed by selectively removing the thirdconductive layer 27A shown in FIG. 5A. In order to form the thirdconductive pattern 27, an etching process or a planarization process maybe performed. While forming the third conductive pattern 27, a gluepattern 26 and a barrier pattern 25 are formed. In order to form theglue pattern 26 and the barrier pattern 25, an etch-back process or aCMP process may be performed.

As the barrier pattern 25, the glue pattern 26 and the third conductivepattern 27 are formed, a conductive structure 28 is formed in theopening 13. The conductive structure 28 includes the first conductivepattern 16, the second conductive pattern 20, the barrier pattern 25,the glue pattern 26 and the third conductive pattern 27. The secondconductive pattern 20 forms an ohmic contact between the firstconductive pattern 16 and the third conductive pattern 27. The barrierpattern 25 caps the air gap 17. The glue pattern 26 increases theadhesion force between the second conductive pattern 20 and the thirdconductive pattern 27. The barrier pattern 25 and the glue pattern 26prevent inter-diffusion between the second conductive pattern 20 and thethird conductive pattern 27. The air gap 17 is defined between thesecond conductive pattern 20 and the sidewalls of the opening 13. Adielectric structure including the air gap 17 and the spacer 14 isformed between the conductive structure 28 and the sidewalls of theopening 13.

By the air gap capping methods shown in FIGS. 4B and 5B, the air gap 17is capped by a conductive material which constitutes a part of theconductive structure 24 and 28. Thus, it is not necessary to cap the airgap 17 using spacer formed of a dielectric material, accordingly, a wideplugging area for the third conductive pattern 23 and 27 may be secured.

The conductive structure 24 and 28 may become a plug, an electrode, orthe like. For example, when the conductive structure 24 and 28 is aplug, the conductive structure 24 and 28 may be constituted by a stackstructure of a silicon plug, an ohmic contact layer, and a metal plug,and the air gap 17 is defined around the silicon plug. The firstconductive pattern 16 becomes the silicon plug, the third conductivepattern 23 and 27 becomes the metal plug, and the second conductivepattern 20 becomes the ohmic contact layer. Further, the conductivestructure 24 and 28 may become a bit line, a metal line, a gateelectrode, a word line, a through electrode, or the like.

According to the first embodiment and the modification thereof, as theair gap 17 is defined, the electrical insulation characteristics of theconductive structure 24 and 28 may be improved. For example, in the casewhere another conductive pattern is disposed adjacent to the firstconductive pattern 16, the parasitic capacitance between the twoconductive patterns may be reduced.

Moreover, since the second conductive pattern 20 includes a silicidelayer, the sheet resistance (Rs) of the conductive structure 24 and 28may be reduced. In particular, since a low resistance silicide layer isincluded, the sheet resistance (Rs) of the conductive structure 24 and28 may be further reduced. As the sheet resistance (Rs) is reduced, acontact resistance (Rc) may be improved.

Further, since the contact area between the first conductive pattern 16and the second conductive pattern 20 increases, the contact resistance(Rc) of the conductive structure 24 and 28 may be further improved.

Furthermore, it is possible to cap the air gap 17 using a conductivematerial without using a dielectric material. As a consequence, aparasitic capacitance (Cb) may be reduced due to the air gap 17, a sheetresistance (Rs) may be reduced by the low resistance silicide layer, andthe contact resistance (Rc) of the conductive structure 24 and 28 may beimproved attributable to an increase in the contact area between thefirst conductive pattern 16 and the second conductive pattern 20.

FIG. 6A is a cross-sectional view illustrating a semiconductor device inaccordance with a third embodiment.

Referring to FIG. 6A, a plurality of conductive structures are formed ona substrate 201. The conductive structures include first conductivestructures 204 and second conductive structures 205. Dielectricstructures with air gaps 209 are formed between the first conductivestructures 204 and the second conductive structures 205. Spacers 210 areformed on the sidewalls of the first conductive structures 204. The airgaps 209 are defined between the spacers 210 and the second conductivestructures 205. Each of the first conductive structures 204 includes afirst conductive pattern 202 and a dielectric pattern 203. Each of thesecond conductive structures 205 includes a second conductive pattern206, a third conductive pattern 207, a barrier pattern 211, a gluepattern 212, and a fourth conductive pattern 208. The third conductivepatterns 207 and the air gaps 209 are capped by the barrier patterns211. Dielectric structures including the air gaps 209 and the spacers210 are formed between the third conductive patterns 207 and the firstconductive patterns 202.

The substrate 201 may include a silicon substrate, a silicon germaniumsubstrate, or an SOI substrate.

Each of the first conductive structures 204 includes the firstconductive pattern 202. Each first conductive structure 204 may includea stack structure of the first conductive pattern 202 and the dielectricpattern 203. The first conductive pattern 202 may include asilicon-containing layer or a metal-containing layer. The firstconductive pattern 202 may include a stack structure of asilicon-containing layer and a metal-containing layer. The firstconductive pattern 202 may include polysilicon, metal, metal nitride, ormetal silicide. The first conductive pattern 202 may include a stackstructure of a polysilicon layer and a metal layer. The metal layer mayinclude tungsten. The dielectric pattern 203 includes a dielectricmaterial. The dielectric pattern 203 may include oxide or nitride. Eachof the first conductive structures 204 has a line shape or a pillarshape.

Each of the second conductive structure 205 includes the secondconductive pattern 206. The second conductive pattern 206 is formed insuch a way as to be recessed between adjacent first conductivestructures 204. The second conductive structure 205 may include a stackstructure of the second conductive pattern 206, the third conductivepattern 207, the barrier pattern 211, the glue pattern 212, and thefourth conductive pattern 208. The height of the second conductivepattern 206 is identical to or larger than the first conductive pattern202. An interlayer dielectric layer (not shown) which has openingsbetween adjacent first conductive structures 204 may be formed, and thesecond conductive structures 205 may be formed in the openings. Each ofthe openings may have a shape which exposes the sidewalls of adjacentfirst conductive structures 204. The third conductive pattern 207 coversthe top surface and the sidewalls of the second conductive pattern 206.The air gaps 209 are defined between the third conductive patterns 207and the first conductive patterns 202. The third conductive patterns 207and the air gaps 209 are capped by the barrier patterns 211. The secondconductive pattern 206 includes a silicon-containing material. Thesecond conductive pattern 206 may include polysilicon. The fourthconductive pattern 208 includes a metal-containing material. The fourthconductive pattern 208 may include tungsten. The third conductivepattern 207 includes silicide. The third conductive pattern 207 mayinclude metal silicide. For instance, the third conductive pattern 207may include titanium silicide, cobalt silicide, nickel silicide, ortungsten silicide. In the exemplary embodiment, the third conductivepattern 207 includes cobalt silicide. The third conductive pattern 207includes cobalt silicide with a phase of CoSi₂. Each of the barrierpatterns 211 covers the top surface and the sidewalls of an upperportion of the third conductive pattern 207 and caps the air gaps 209.The barrier pattern 211 does not fill the air gaps 209 but caps the airgaps 209. The barrier patterns 211 cover the sidewalls of the firstconductive structures 204 over the air gaps 209. The barrier patterns211 include a metal-containing material. The barrier patterns 211 mayinclude titanium. The glue patterns 212 include a metal-containingmaterial. The glue patterns 212 may include titanium nitride (TiN). Eachof the second conductive structures 205 has a line shape or a pillarshape.

The spacers 210 are formed on the sidewalls of the first conductivestructures 204. The spacers 210 include a low-k material. The low-kmaterial includes oxide or nitride. The spacers 210 may include siliconoxide, silicon nitride or metal oxide.

The air gaps 209 may be defined by removing a sacrificial materialformed between the third conductive patterns 207 and the spacers 210.

FIG. 6B is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the third embodiment. In FIGS. 6A and6B, like reference numerals are used to refer to the same elements.

Referring to FIG. 6B, unlike FIG. 6A, the air gaps 209 and the thirdconductive patterns 207 are capped by fourth conductive patterns 208Bwithout the barrier patterns 211 and the glue patterns 212 of FIG. 6A.Each of second conductive structures 205B becomes a stack structure ofthe second conductive pattern 206, the third conductive pattern 207, andthe fourth conductive pattern 208B.

In FIGS. 6A and 6B, any one conductive structure of the first conductivestructure 204 and the second conductive structure 205 and 205B may havea line shape which extends in any one direction. The other conductivestructure may have a pillar shape. For example, the first conductivestructure 204 has a line shape, and the second conductive structure 205and 205B has a pillar shape. The pillar shape may become a plugstructure. The first conductive structure 204 includes a bit line, ametal line, or a word line, and the second conductive structure 205 and205B includes a contact plug. The contact plug may include a storagenode contact plug, a landing plug, or a metal contact plug. For example,the first conductive structure 204 may become a bit line structure, andthe second conductive structure 205 and 205B may become a storage nodecontact plug. In the second conductive structure 205 and 205B, thesecond conductive pattern 206 includes a silicon plug. The fourthconductive pattern 208 and 208B includes a metal plug. The thirdconductive pattern 207 becomes an ohmic contact layer between thesilicon plug and the metal plug. The second conductive structure 205 and205B including the silicon plug and the metal plug may be referred to asa semi-metal plug (SMP).

FIG. 6C is a cross-sectional view illustrating a semiconductor device inaccordance with a fourth embodiment.

Referring to FIG. 6C, a plurality of conductive structures are formed ona substrate 221. The conductive structures include first conductivestructures 224 and second conductive structures 225. Dielectricstructures with air gaps 226 are formed between the first conductivestructures 224 and the second conductive structures 225. Spacers 227 areformed on the sidewalls of the first conductive structures 224. The airgaps 226 are defined between the spacers 227 and the second conductivestructures 225. Each of the first conductive structures 224 includes afirst conductive pattern 222 and a dielectric pattern 223. Each of thesecond conductive structures 225 includes a second conductive pattern228, a barrier pattern 229, a glue pattern 230, and a third conductivepattern 231. The second conductive patterns 228 and the air gaps 226 arecapped by the barrier patterns 229. Dielectric structures including theair gaps 226 and the spacers 227 are formed between second conductivepatterns 228 and the first conductive patterns 222.

The second conductive patterns 228 include silicide. The secondconductive patterns 228 may include metal silicide. The secondconductive patterns 228 include metal silicide which is formed bydeposition. The metal silicide may be formed by CVD. The secondconductive patterns 228 may include metal silicide which is formed by afully-silicidation process. The second conductive patterns 228 mayinclude titanium silicide, cobalt silicide, nickel silicide, or tungstensilicide. In the exemplary embodiment, the second conductive patterns228 include cobalt silicide. The second conductive patterns 228 includecobalt silicide with the phase of CoSi₂.

FIG. 6D is a cross-sectional view illustrating a semiconductor device inaccordance with a modification of the fourth embodiment. In FIGS. 6C and6D, like reference numerals are used to refer to the same elements.

Referring to FIG. 6D, unlike FIG. 6C, the air gaps 226 and the secondconductive patterns 228 are capped by third conductive patterns 231Dwithout the barrier patterns 229 and the glue patterns 230 of FIG. 6C.Each of second conductive structures 225 becomes a stack structure ofthe second conductive pattern 228 and the third conductive pattern 231D.

In FIGS. 6C and 6D, the second conductive structures 225 may become plugstructures. The second conductive patterns 228 include silicide plugs.The third conductive patterns 231 include metal plugs. The secondconductive structures 225 including the silicide plugs and the metalplugs may be referred to as metal-base plugs.

While not shown, in each of the semiconductor devices shown in FIGS. 6Ato 6D, a transistor which includes a gate electrode formed on thesubstrate 201 and 221 and a source region and a drain region formed inthe substrate 201 and 221 may be formed. Each of the second conductivestructures 205, 205B, 225, and 225D may be connected to the sourceregion or the drain region of the transistor. The transistor may includea planar gate type transistor, a trench gate type transistor, a buriedgate type transistor, a recess gate type transistor, or a verticalchannel transistor. An additional conductive structure may be formed oneach of the second conductive structures 205, 205B, 225, and 225D. Theadditional conductive structure may include a metal line or a memoryelement.

FIGS. 7A to 7I are cross-sectional views showing an exemplary method forfabricating the semiconductor device in accordance with the thirdembodiment.

Referring to FIG. 7A, a plurality of first conductive structures 34 areformed on a substrate 31. The substrate 31 includes a semiconductorsubstrate. The substrate 31 may include a silicon substrate, a silicongermanium substrate, or an SOI substrate.

The plurality of first conductive structures 34 is disposed at regularintervals. Each of the first conductive structures 34 may have a lineshape. In order to form the first conductive structures 34, hard maskpatterns 33 are formed on a first conductive layer (not shown). Byetching the first conductive layer using the hard mask patterns 33 as anetch mask, first conductive patterns 32 are formed. In each of the firstconductive structures 34, the first conductive pattern 32 and the hardmask pattern 33 are stacked and formed. The first conductive patterns 32include a silicon-containing layer or a metal-containing layer. Forexample, the first conductive patterns 32 may include polysilicon ortungsten. The first conductive patterns 32 may be formed by stacking asilicon-containing layer and a metal-containing layer. For example, thefirst conductive patterns 32 may be formed by stacking a polysiliconlayer and a tungsten layer. A barrier layer (not shown) may be formedbetween the polysilicon layer and the tungsten layer. The firstconductive patterns 32 may include a stack structure of a polysiliconlayer, a titanium layer and a tungsten layer. The titanium layer as thebarrier layer may be formed by stacking titanium (Ti) and titaniumnitride (TiN). The hard mask patterns 33 are formed using a dielectricmaterial.

A first dielectric layer 35A is formed on the plurality of firstconductive structures 34. The first dielectric layer 35A includes alow-k material. The first dielectric layer 35A includes nitride oroxide. For instance, the first dielectric layer 35A may include siliconnitride or silicon oxide. The first dielectric layer 35A is conformallyformed on the entire surface of the resultant structure including thefirst conductive structures 34. The first dielectric layer 35A is amaterial which will become spacers.

A second dielectric layer 36A is formed on the first dielectric layer35A. The second dielectric layer 36A may include silicon oxide. Thesecond dielectric layer 36A may be formed on the first dielectric layer35A in such a way as to fill the spaces between the first conductivestructures 34. The second dielectric layer 36A becomes an interlayerdielectric layer.

Referring to FIG. 7B, the second dielectric layer 36A is planarized. Thesecond dielectric layer 36A may be planarized such that the surface ofthe first dielectric layer 35A on the first conductive structures 54 isexposed.

Openings 37 are defined in the second dielectric layer 36A which hasbeen planarized. The openings 37 are defined by etching the planarizedsecond dielectric layer 36A shown in FIG. 7A. To define the openings 37,mask patterns (not shown) may be used. Each of the openings 37 may havea hole shape or a line shape. A plurality of openings 37 may be definedat regular intervals in such a way as to define an opening array. Eachof the openings 37 may be formed between adjacent first conductivestructures 34. Through the openings 37, the first dielectric layer 35Aformed on the sidewalls of the first conductive structures 34 may beexposed. In order to define the openings 37, the second dielectric layer36A may be etched by being aligned with the first conductive structures34 and the first dielectric layer 35A.

The first dielectric layer 35A may remain on the substrate 31 on thebottoms of the openings 37.

Referring to FIG. 7C, a sacrificial layer 38A is formed over the entiresurface of the resultant structure which is defined by the openings 37.The sacrificial layer 38A is conformally formed on the first dielectriclayer 35A without filling the opening 37. The sacrificial layer 38Aincludes a material which may be removed by wet etching. The sacrificiallayer 38A may include metal nitride. The sacrificial layer 38A mayinclude titanium nitride (TiN).

In an alternative embodiment, after defining the openings 37, the firstdielectric layer 35A and the sacrificial layer 38A may be sequentiallyformed. Accordingly, the first dielectric layer 35A and the sacrificiallayer 38A are formed to cover the surface of exposed portions of thesubstrate 31, the sidewalls of the openings 37, and the top surfaces ofthe hard mask patterns 33.

Referring to FIG. 7D, spacers 35 and sacrificial spacers 38 are formedon the sidewalls of the openings 37. The sacrificial spacers 38 areformed by etching the sacrificial layer 38A. The spacers 35 are formedby etching the first dielectric layer 35A. In order to form the spacers35 and the sacrificial spacers 38, an etch-back process may beperformed. The spacers 35 are formed on the sidewalls of the firstconductive structures 34. The sacrificial spacers 38 are formed on thesidewalls of the spacers 35. By forming the spacers 35, the surface ofportions of the substrate 31 are exposed between the first conductivestructures 34. The sacrificial spacers 38 are formed on the sidewalls ofthe openings 37.

Referring to FIG. 7E, second conductive patterns 39A are formed. Thesecond conductive patterns 39A are formed in such a way as to berecessed in the openings 37. In detail, a second conductive layer (notshown) is formed on the entire surface of the resultant structureincluding the sacrificial spacers 38. The second conductive layer isformed in such a way as to fill the openings 37. By selectively removingthe second conductive layer, the second conductive patterns 39A areformed in the openings 37. In order to form the second conductivepatterns 39A, the second conductive layer may be etched by an etch-backprocess. The second conductive patterns 39A include a silicidablematerial. The second conductive patterns 39A may include asilicon-containing layer. The second conductive patterns 39A may includepolysilicon. The second conductive patterns 39A contact the surface ofthe exposed portions of the substrate 31. The second conductive patterns39A are recessed to have the top surface lower than the top surface ofthe first conductive structures 34. The recessed surface of the secondconductive patterns 39A may be controlled to be higher than the topsurface of the first conductive patterns 32. Each of the secondconductive patterns 39A may have a height to minimize an area betweeneach second conductive pattern 39A and each first conductive pattern 32arranged opposite one another. Accordingly, the parasitic capacitancebetween the first conductive pattern 32 and the second conductivepattern 39A may be reduced.

By forming the second conductive patterns 39A to be recessed in theopenings 37 between the first conductive structures 34, portions of thesacrificial spacers 38 are exposed.

Referring to FIG. 7F, the sacrificial spacers 38 are removed. In orderto remove the sacrificial spacers 38, a strip process is performed. Thestrip process may include a cleaning process. The cleaning process usesa wet chemical capable of removing the sacrificial spacers 38.

After the sacrificial spacers 38 are removed by the strip process, andthe spaces occupied by the sacrificial spacers 38 remain as air gaps 40.The air gaps 40 are defined between the second conductive patterns 39Aand the sidewalls of the openings 37. Accordingly, dielectric structuresconstituted by the air gaps 40 and the spacers 35 are formed between thesecond conductive patterns 39A and the sidewalls of the openings 37.

Referring to FIG. 7G, a silicidable layer 41 is formed. The silicidablelayer 41 is formed over the entire surface of the resultant structurewhile covering the second conductive patterns 39A. The silicidable layer41 is formed on the top surfaces and the sidewalls of the secondconductive patterns 39A which are exposed due to the air gaps 40. Thesilicidable layer 41 may gap-fill the air gaps 40. The silicidable layer41 includes a material capable of forming silicide on the top surfacesand the sidewalls of the second conductive patterns 39A. The silicidablelayer 41 includes a silicidable metal. For example, the silicidablemetal may include titanium, cobalt, tungsten, or nickel. The silicidablelayer 41 may be formed by CVD. Accordingly, the silicidable layer 41 isformed with a uniform thickness on the top surfaces and the sidewalls ofthe second conductive patterns 39A. The silicidable metals are allconductive materials.

Hereinafter, in the exemplary embodiment, the silicidable layer 41includes cobalt.

A capping layer 42 is formed on the silicidable layer 41. The cappinglayer 42 is conformally formed. The capping layer 42 prevents a silicidelayer to be subsequently formed, from being attacked. The capping layer42 is formed by atomic layer deposition (ALD). The capping layer 42includes metal nitride. The capping layer 42 includes atitanium-containing material. The capping layer 42 may include titaniumnitride (TiN). The capping layer 42 may be formed by stacking titaniumand titanium nitride. The capping layer 42 may be formed in the air gaps40 or may not be formed in the air gaps 40. For example, when thesilicidable layer 41 is formed without gap-filling the air gaps 40, thecapping layer 42 may be formed in the air gaps 40. In the case when thesilicidable layer 41 is formed to gap-fill the air gaps 40, the cappinglayer 42 is not formed in the air gaps 40.

According to the above descriptions, the silicidable layer 41 is formedto cover the top surfaces and the sidewalls of the second conductivepatterns 39A. Therefore, because the contact area between each secondconductive pattern 39A and the silicidable layer 41 increases, an areafor forming a silicide layer to be subsequently formed increases.

Referring to FIG. 7H, third conductive patterns 44 are formed. In orderto form the third conductive patterns 44, a thermal process may beperformed. The thermal process includes an annealing process 43. Theannealing process 43 is performed to make the second conductive patterns39A shown in FIG. 7G and the silicidable layer 41 react with each other.A silicidation reaction occurs along the interface where the secondconductive patterns 39A and the silicidable layer 41 contact each other.Accordingly, a silicide layer is formed. The silicide layer becomes thethird conductive patterns 44. The third conductive patterns 44 serve asan ohmic contact layer. The annealing process 43 may be performed at atemperature of at least 200° C. The annealing process 43 includes arapid thermal annealing (RTA) process.

As the annealing process 43 is performed, the silicon of the secondconductive patterns 39A and the metal of the silicidable layer 41 reactwith each other, and a metal silicide layer is formed. The metalsilicide layer may include titanium silicide, cobalt silicide, nickelsilicide, or tungsten silicide. Since the second conductive patterns 39Ainclude polysilicon and the silicidable layer 41 includes cobalt, acobalt silicide layer is formed by the annealing process 43.

In order to form the cobalt silicide layer, the annealing process 43 maybe performed twice. By a primary annealing process, cobalt silicide witha phase of CoSi_(x) (x=0.1˜1.5) is formed. A secondary annealing processis performed after the primary annealing process. The secondaryannealing process may be performed at a temperature higher than theprimary annealing process. The secondary annealing process is performedat a temperature ranging from approximately 600° C. to approximately800° C. A phase change of the cobalt silicide layer occurs by thesecondary annealing process. For example, a phase change to cobaltsilicide with the phase of CoSi₂ occurs by the secondary annealingprocess. The resistivity of the cobalt silicide with the phase of CoSi₂is lower than the cobalt silicide with the phase of CoSi_(x)(x=0.1˜1.5). By forming the cobalt silicide with the phase of CoSi₂,contact resistance may be reduced, and at the same time, it is possibleto form cobalt silicide with a lower resistance even in the small areaof each opening 37 with a fine line width. The secondary annealingprocess may be performed after removing an unreacted silicidable layer41A.

Because the third conductive patterns 44 are formed by consuming thesilicon of the second conductive patterns 39A, the second conductivepatterns 39A may be reduced in their volumes as indicated by thereference numeral 39. After the annealing process 43, the secondconductive patterns 39 are covered by the third conductive patterns 44.

As described above, the third conductive patterns 44 which cover the topsurfaces and the sidewalls of the second conductive patterns 39 areformed by the silicidation reaction. The third conductive patterns 44serve as an ohmic contact layer between the second conductive patterns39 and fourth conductive patterns to be subsequently formed.

The unreacted silicidable layer 41A may remain on the third conductivepatterns 44.

Referring to FIG. 7I, the unreacted silicidable layer 41A and thecapping layer 42 are removed. In order to remove the unreactedsilicidable layer 41A and the capping layer 42, a strip process isperformed. The strip process includes a cleaning process using a wetchemical.

By the strip process, the unreacted silicidable layer 41A is removed.Accordingly, the air gaps 40 are opened again. Since the air gaps 40 aredefined between the third conductive patterns 44 and the sidewalls ofthe openings 37, dielectric structures constituted by the air gaps 40and the spacers 35 are formed between the third conductive patterns 44and the sidewalls of the openings 37. The volumes of the air gaps 40 maybe identical to or smaller than the initially defined air gaps 40.

FIG. 8 is a cross-sectional view illustrating an exemplary method forcapping the air gaps in the semiconductor device in accordance with thethird embodiment. In FIG. 7I and FIG. 8, like reference numerals areused to refer to the same elements.

Referring to FIG. 8, fourth conductive patterns 45 are formed. The airgaps 40 and the third conductive patterns 44 are capped by the fourthconductive patterns 45. The fourth conductive patterns 45 cap the airgaps 40 and cover the top surfaces of the third conductive patterns 44.Since the spaces of the air gaps 40 are narrow, the air gaps 40 may notbe filled but be capped when forming the fourth conductive patterns 45.The fourth conductive patterns 45 are formed to fill the remainders ofthe openings 37 on the third conductive patterns 44. Further, the fourthconductive patterns 45 may cover the top surfaces and the sidewalls ofthe upper portion of the third conductive patterns 44. The fourthconductive patterns 45 may include a metal-containing layer. The fourthconductive patterns 45 may include a tungsten layer. In order to formthe fourth conductive patterns 45, a fourth conductive layer (not shown)may be deposited and planarized.

Accordingly, second conductive structures 46 are formed in the openings37. Each of the second conductive structures 46 includes the secondconductive pattern 39, the third conductive pattern 44, and the fourthconductive pattern 45. The third conductive pattern 44 forms an ohmiccontact between the second conductive pattern 39 and the fourthconductive pattern 45. The air gaps 40 are defined between the thirdconductive patterns 44 and the sidewalls of the openings 37. When theopenings 37 are self-aligned with the sidewalls of the first conductivestructures 34, the air gaps 40 may be defined between the thirdconductive patterns 44 and the first conductive patterns 32. Dielectricstructures including the air gaps 40 and the spacers 35 are formedbetween the second conductive structures 46 and the first conductivestructures 34.

FIG. 9 is a cross-sectional view illustrating another exemplary methodfor capping the air gaps in the semiconductor device in accordance withthe third embodiment. In FIG. 7I and FIG. 9, like reference numerals areused to refer to the same elements.

Referring to FIG. 9, barrier patterns 47, glue patterns 48 and fourthconductive patterns 49 are formed on the third conductive patterns 44.Accordingly, each of second conductive structures 50 formed in theopenings 37 includes the second conductive pattern 39, the thirdconductive pattern 44, the barrier pattern 47, the glue pattern 48, andthe fourth conductive pattern 49. The third conductive patterns 44 andthe air gaps 40 are capped by the barrier patterns 47.

According to the third embodiment and the modification thereof, bydefining the air gaps 40, the parasitic capacitance between the firstconductive structures 34 and the second conductive structures 46 and 50may be reduced.

Additionally, since the third conductive patterns 44 include a silicidelayer, the sheet resistance (Rs) of the second conductive structures 46and 50 may be reduced. In particular, since a low resistance silicidelayer is included, the sheet resistance (Rs) of the second conductivestructures 46 and 50 may be further reduced. As the sheet resistance(Rs) is reduced, a contact resistance (Rc) may be improved.

Furthermore, it is possible to cap the air gaps 40 using a conductivematerial without using a dielectric material. As a consequence, aparasitic capacitance (Cb) may be reduced due to the air gaps 40, asheet resistance (Rs) may be reduced by the low resistance silicidelayer, and the contact resistance (Rc) of the second conductivestructures 46 and 50 may be improved.

FIG. 10A is a cross-sectional view illustrating exemplary memory cellsof a semiconductor device. FIG. 10B is a plan view taken along the lineA-A′ of FIG. 10A. FIG. 10C is a cross-sectional view taken along theline B-B′ of FIG. 10B. The memory cells shown in FIG. 10A include thememory cells of a DRAM.

Referring to FIGS. 10A to 10C, active regions 303 are defined in asubstrate 301 by isolation regions 302. Gate trenches 321 are formedacross the active regions 303. Gate dielectric layers 322 are formedalong the surface of the gate trenches 321. Buried gate electrodes 323are formed on the gate dielectric layer 322 in such a way as to fill alower portion of the gate trenches 321. While not shown, source regionsand drain regions are formed in the substrate 301. Sealing layers 324are formed on the buried gate electrodes 323. Bit line structures 310,which include bit lines 307 extending in a direction crossing with theburied gate electrodes 323, are formed.

Each of the bit line structures 310 includes a bit line 307, a bit linehard mask 308, and a bit line spacer 309. The bit line 307 is connectedwith the active region 303 through a bit line contact plug 306. The bitline contact plug 306 is formed in a bit line contact hole 305 that isdefined in a first interlayer dielectric layer 304.

Storage node contact plugs 312 are formed to be connected with theactive regions 303. The storage node contact plugs 312 are formed instorage node contact holes 311 that penetrate the first interlayerdielectric layer 304 and a second interlayer dielectric layer 304A. Eachof the storage node contact plugs 312 includes a first plug 313, anohmic contact layer 314, a barrier pattern 315, a glue pattern 316 and asecond plug 317. The first plug 313 is a silicon plug which includespolysilicon. The second plug 317 is a metal plug which includestungsten. The ohmic contact layer 314 covers the top surface and thesidewalls of the first plug 313.

Dielectric structures including air gaps 318 and spacers 319 are formedbetween the storage node contact plugs 312 and the bit lines 307. Theair gaps 318 are capped by the barrier patterns 315. The air gaps 318and the barrier patterns 315 may be defined and formed by applying themethods described in the exemplary embodiments.

Capacitors including storage nodes 320 are connected to the storage nodecontact plugs 312. Each of the storage nodes 320 has a pillar shape.While not shown, a dielectric layer and plate nodes may be formed on thestorage nodes 320. Each of the storage nodes 320 may have a cylindershape instead of the pillar shape.

As can be seen from the above descriptions, each memory cell includes aburied gate type transistor including the buried gate electrode 323, thebit line 307, the storage node contact plug 312, and the capacitorincluding storage nodes 320. The storage node contact plug 312 isseparated from the sidewalls of the bit lines 307 by the air gaps 318.Therefore, the parasitic capacitance between the bit line 307 and thestorage node contact plug 312 may be reduced.

FIG. 11 is a cross-sectional view illustrating a modification of theexemplary memory cells of FIG. 10A. In FIG. 10A and FIG. 11, likereference numerals are used to refer to the same elements.

Referring to FIG. 11, each storage node contact plug 312 includes afirst plug 313A, the barrier pattern 315, the glue pattern 316, and thesecond plug 317. The first plug 313A includes metal silicide. That is,the first plug 313A is a silicide plug. The second plug 317 is a metalplug which includes tungsten.

FIGS. 12A to 12I are cross-sectional views illustrating an exemplarymethod for fabricating the exemplary memory cells of FIG. 10A.

Referring to FIG. 12A, isolation regions 52 are formed in a substrate51. Active regions 53 are defined by the isolation regions 52. Thesubstrate 51 may include a silicon substrate, a silicon germaniumsubstrate, or an SOI substrate. The isolation regions 52 may be formedby a shallow trench isolation (STI) process. The isolation regions 52may be formed by sequentially forming a wall oxide, a liner and agap-fill material. The liner may include silicon nitride or siliconoxide. The silicon nitride may include Si₃N₄, and the silicon oxide mayinclude SiO₂. The gap-fill material may include silicon oxide such as aspin-on-dielectric (SOD). In an alternative embodiment, the gap-fillmaterial may include silicon nitride which is used as the liner.

While not shown, after forming the isolation regions 52, buried gateelectrodes (see the reference numeral ‘323’ in FIG. 10C) may be formed.

Hereinafter, a method for forming the buried gate electrodes will bedescribed with reference to FIG. 10C.

First, after defining the gate trenches 321 by etching the substrate301, the buried gate electrodes 323 are formed to be recessed in thegate trenches 321. Thereafter, the sealing layer 324 is formed on theburied gate electrodes 323. Before forming the buried gate electrodes323, the gate dielectric layer 322 may be formed along the surface ofthe gate trenches 321. The buried gate electrodes 323 may be formed byforming a metal-containing layer to fill the gate trenches 321 and thenetching back the metal-containing layer. The metal-containing layer mayinclude a material which includes metal, such as titanium, tantalum, andtungsten, as a main constituent. The metal-containing layer may includeat least any one selected from the group consisting of tantalum nitride(TaN), titanium nitride (TiN), tungsten nitride (WN), and tungsten (W).For example, the buried gate electrodes 323 may include a single layerstructure having any of titanium nitride, tantalum nitride, andtungsten, or may include a dual layer structure such as TiN/W or TaN/Win which tungsten (W) is stacked on titanium nitride (TiN) or tantalumnitride (TaN). Also, the buried gate electrodes 323 may include a duallayer structure such as WN/W in which tungsten (W) is stacked on atungsten nitride (WN), and also may include a low-resistance metalmaterial. The sealing layer 324 may fill the gate trenches 321 on theburied gate electrodes 323. The sealing layer 324 may protect the buriedgate electrodes 323 from a subsequent process. The sealing layer 324 mayinclude a dielectric material. The sealing layer 324 may include siliconnitride. After forming the sealing layer 324, source regions and drainregions (not shown) may be formed in the active regions 303.Consequently, buried gate type transistors including the buried gateelectrodes 323 are formed.

Referring back to FIG. 12A, a first interlayer dielectric layer 54A isformed on the entire surface of the substrate 51. The first interlayerdielectric layer 54A may include silicon oxide or silicon nitride. Anetch stop layer (not shown) including silicon nitride may be formed onthe first interlayer dielectric layer 54A.

A bit line contact hole 55 is defined by etching the first interlayerdielectric layer 54A. In order to define the bit line contact hole 55,mask patterns (not shown) may be used as an etch mask. After definingthe bit line contact hole 55, the active regions 53 may be recessed by aset depth. Accordingly, it is possible to increase the contact areabetween a bit line contact plug 56 to be subsequently formed and theactive regions 53. The active regions 53 which are exposed by the bitline contact hole 55 include any one of source regions and drain regionsof the buried gate type transistors.

The bit line contact plug 56 is formed in the bit line contact hole 55.The bit line contact plug 56 is formed in the bit line contact hole 55.To form the bit line contact plug 56, after forming a conductive layer(not shown) on the entire surface of the resultant structure to fill thebit line contact hole 55, the conductive layer may be planarized. Thebit line contact plug 56 may include a polysilicon layer or a metallayer.

Bit lines 57 and bit line hard masks 58 are formed on the bit linecontact plug 56. In an alternative embodiment, a line width of the bitlines 57 and the bit line hard masks 58 may be set to be smaller thanthe bit line contact hole 55 such as to etch the bit line contact plug56. In this case, although the sidewalls of the bit line contact hole 55may be exposed as the bit line contact plug 56 is etched, the exposedsidewalls may be filled by bit line spacers 59 which are to besubsequently formed. The bit lines 57 include a metal-containing layersuch as tungsten. The bit line hard masks 58 include silicon nitride.

The bit line spacers 59 are formed on the sidewalls of the bit lines 57and the bit line hard masks 58. The bit line spacers 59 may includesilicon nitride.

By forming the bit line spacers 59 as described above, bit linestructures 60 each including the bit line 57, the bit line hard mask 58and the bit line spacers 59 are formed.

While not shown, the process for forming the bit line structures 60 maybe performed simultaneously with a process for forming the gatestructures of transistors formed in a peripheral circuit region. Gatestructures including silicon electrodes the same as bit line contactplugs and metal electrodes the same as bit lines, may be formed.

A second interlayer dielectric layer 61 is formed on the entire surfaceof the resulting structure including the bit line structures 60. Thesecond interlayer dielectric layer 61 may be subsequently patterned orplanarized to fill the spaces between adjacent bit line structures 60.

Referring to FIG. 12B, the second interlayer dielectric layer 61 and thefirst interlayer dielectric layer 54A shown in FIG. 12A are etched usingmask patterns (not shown) as an etch mask. A first interlayer dielectriclayer 54 is formed. Accordingly, storage node contact holes 62 aredefined between the bit line structures 60. The storage node contactholes 62 may be defined in a self-aligned manner by the bit linestructures 60. Therefore, the sidewalls of adjacent bit line structures60 are exposed by the storage node contact holes 62. The surface ofportions of the substrate 51 is exposed by the storage node contactholes 62. The active regions 53 which are exposed by the storage nodecontact holes 62 include any one of the source regions and drain regionsof the buried gate type transistors. While not shown, a lower portion ofthe storage node contact holes 62 may be enlarged by subsequentlyperforming wet etching. At this time, portions of the first interlayerdielectric layer 54 are isotropically etched. While not shown, afterdefining the storage node contact holes 62, the second interlayerdielectric layer 61 remains. That is, the second interlayer dielectriclayer 61 which is formed in the storage node contact holes 62 remainsbetween the bit line structures 60.

Referring to FIG. 12C, spacers 63 and sacrificial spacers 64 are formedon the sidewalls of the storage node contact holes 62. For example, adielectric layer (not shown) and a sacrificial layer (not shown) areformed. The sacrificial spacers 64 are formed by etching back thesacrificial layer. The dielectric layer which is exposed by thesacrificial spacers 64 is etched back. Accordingly, the spacers 63 areformed. The spacers 63 are formed on the sidewalls of the storage nodecontact holes 62. The sacrificial spacers 64 are formed on the sidewallsof the spacers 63. By forming the sacrificial spacers 64, the surfacesof the active regions 53 are exposed on the bottoms of the storage nodecontact holes 62. In an alternative embodiment, the sacrificial spacers64 may be formed without forming the spacers 63 so as to increase a linewidth of storage node contact plugs.

First plugs 65A are formed in the storage node contact holes 62. Thefirst plugs 65A fill a part of the storage node contact holes 62. Thatis, the first plugs 65A are formed in such a way as to be recessed inthe storage node contact holes 62. The first plugs 65A are formed byforming a conductive layer (not shown) on the entire surface of theresulting structure to fill the storage node contact holes 62 and thenrecessing the conductive layer. The recessed surfaces of the first plugs65A may be controlled to be higher than the top surface of the bit lines57. The first plugs 65A may have a height to minimize an area betweeneach first plug 65A and each bit line 57 arranged opposite one another.Accordingly, the parasitic capacitance between the bit lines 57 and thefirst plugs 65A may be reduced. The first plugs 65A include asilicon-containing layer. The first plugs 65A may include a polysiliconlayer. The first plugs 65A become silicon plugs.

By forming the recessed first plugs 65A, the top surfaces and thesidewalls of the sacrificial spacers 64 are exposed.

Referring to FIG. 12D, the sacrificial spacers 64 are removed. To removethe sacrificial spacers 64, a strip process is performed. The stripprocess may include a cleaning process. The cleaning process uses a wetchemical capable of removing the sacrificial spacers 64.

After the sacrificial spacers 64 are removed by the strip process, thespaces occupied by the sacrificial spacers 64 remain as air gaps 66.

The air gaps 66 are defined between the first plugs 65A and thesidewalls of the storage node contact holes 62. Dielectric structurescomprised of the air gaps 66 and the spacers 63 are formed between thefirst plugs 65A and the bit line structures 60.

Referring to FIG. 12E, a silicidable layer 67 is formed. The silicidablelayer 67 is formed over the entire surface of the resulting structurewhile covering the first plugs 65A. The silicidable layer 67 is formedon the top surfaces and sidewalls of the first plugs 65A which areexposed due to the air gaps 66 shown in FIG. 12D. The silicidable layer67 may gap-fill the air gaps 66 shown in FIG. 12D. The silicidable layer67 includes a material capable of forming silicide on the top surfacesand the sidewalls of the first plugs 65A. The silicidable layer 67includes a silicidable metal. For example, the silicidable metal mayinclude titanium, cobalt, tungsten, or nickel. The silicidable layer 67may be formed by CVD. Accordingly, the silicidable layer 67 is formedwith a uniform thickness on the top surfaces and the sidewalls of thefirst plugs 65A. The silicidable metals are all conductive materials.

Hereinafter, in the exemplary embodiment, the silicidable layer 67includes cobalt.

A capping layer 68 is formed on the silicidable layer 67. The cappinglayer 68 is conformally formed. The capping layer 68 prevents a silicidelayer to be subsequently formed, from being attacked. The capping layer68 is formed by ALD. The capping layer 68 includes metal nitride. Thecapping layer 68 includes a titanium-containing material. The cappinglayer 68 may include titanium nitride (TiN). The capping layer 68 may beformed by stacking titanium and titanium nitride. The capping layer 68may be formed in the air gaps 66 or may not be formed in the air gaps66. For example, when the silicidable layer 67 is formed withoutgap-filling the air gaps 66, the capping layer 68 may be formed in theair gaps 66. When the silicidable layer 67 gap-fills the air gaps 66,the capping layer 68 is not formed in the air gaps 66.

According to the above descriptions, the silicidable layer 67 is formedto cover the top surfaces and the sidewalls of the first plugs 65A.Therefore, because the contact area between the first plug 65A and thesilicidable layer 67 increases, an area for forming a silicide layer tobe subsequently formed increases.

Referring to FIG. 12F, an ohmic contact layer 70 is formed. In order toform the ohmic contact layer 70, a thermal process may be performed. Thethermal process includes an annealing process 69. The annealing process69 is performed to make the first plugs 65A shown in FIG. 12E and thesilicidable layer 67 shown in FIG. 12E react with each other. Asilicidation reaction occurs along the interface where the first plugs65A shown in FIG. 12E and the silicidable layer 67 shown in FIG. 12Econtact each other. Accordingly, a silicide layer is formed. Thesilicide layer becomes the ohmic contact layer 70. The annealing process69 may be performed at a temperature of at least 200° C. The annealingprocess 69 includes an RTA process.

As the annealing process 69 is performed, the silicon of the first plugs65A shown in FIG. 12E and the metal of the silicidable layer 67 shown inFIG. 12E react with each other, and a metal silicide layer is formed.The metal silicide layer may include titanium silicide, cobalt silicide,nickel silicide, or tungsten silicide. Since the first plugs 65A shownin FIG. 12E include polysilicon and the silicidable layer 67 shown inFIG. 12E includes cobalt, a cobalt silicide layer is formed by theannealing process 69.

In order to form the cobalt silicide layer, the annealing process 69 maybe performed twice. By a primary annealing process, cobalt silicide witha phase of CoSi_(x) (x=0.1˜1.5) is formed. A secondary annealing processis performed after the primary annealing process. The secondaryannealing process may be performed at a temperature higher than theprimary annealing process. The secondary annealing process is performedat a temperature ranging from approximately 600° C. to approximately800° C. A phase change of the cobalt silicide layer occurs by thesecondary annealing process. For example, a phase change to cobaltsilicide with the phase of CoSi_(z) occurs by the secondary annealingprocess. The resistivity of the cobalt silicide with the phase of CoSi₂is lower than the cobalt silicide with the phase of CoSi_(x)(x=0.1˜1.5). By forming the cobalt silicide with the phase of CoSi₂, itis possible to form cobalt silicide with a lower resistance. Thesecondary annealing process may be performed after removing an unreactedsilicidable layer 67A.

Because the ohmic contact layer 70 is formed by consuming the silicon ofthe first plugs 65A shown in FIG. 12E, the first plugs 65A shown in FIG.12E may be reduced in their volumes as indicated by the referencenumeral 65. After the annealing process 69, the first plugs 65 arecovered by the ohmic contact layer 70.

As described above, the ohmic contact layer 70 which covers the topsurfaces and sidewalls of the first plugs 65 is formed by thesilicidation reaction.

The unreacted silicidable layer 67A may remain on the ohmic contactlayer 70.

Referring to FIG. 12G, the unreacted silicidable layer 67A shown in FIG.12F and the capping layer 68 shown in FIG. 12E are removed. In order toremove the unreacted silicidable layer 67A shown in FIG. 12E and thecapping layer 68 shown in FIG. 12E, a strip process is performed. Thestrip process includes a cleaning process using a wet chemical.

By the strip process, the unreacted silicidable layer 67A shown in FIG.12E is removed, and accordingly, the air gaps 66 are opened again. Theair gaps 66 are defined between the ohmic contact layer 70 and thesidewalls of the bit line structures 60.

Referring to FIG. 12H, conductive structures are formed in such a way asto cap the air gaps 66 and cover the top surface and the sidewalls of anupper portion of the ohmic contact layer 70. For example, barrierpatterns 71, glue patterns 72 and second plugs 73 are formed on theohmic contact layer 70 over the air gaps 66. The barrier patterns 71 capthe air gaps 66. A material used as the barrier patterns 71 iscontrolled to have a thickness that does not fill but caps the air gaps66. By controlling the thickness of the barrier patterns 71, it ispossible to cover the top surface of the ohmic contact layer 70 andcover the sidewalls of the ohmic contact layer 70. The barrier patterns71 include a titanium layer. The glue patterns 72 may include titaniumnitride (TiN). The second plugs 73 are formed to fill the remainders ofthe storage node contact holes 62 on the glue patterns 72. The secondplugs 73 may include a metal-containing layer. The second plugs 73 mayinclude a tungsten layer. The second plugs 73 become metal plugs.

In this way, the barrier patterns 71, the glue patterns 72 and thesecond plugs 73 are formed on the ohmic contact layer 70. Accordingly,storage node contact plugs 74 formed in the storage node contact holes62 include the first plugs 65, the ohmic contact layer 70, the barrierpatterns 71, the glue patterns 72 and the second plugs 73. The ohmiccontact layer 70 forms ohmic contacts between the first plugs 65 and thesecond plugs 73. When the first plugs 65 include a silicon-containinglayer and the second plugs 73 include a metal-containing layer, thefirst plugs 65 and the second plugs 73 become semi-metal plugstructures.

The air gaps 66 are defined between the first plugs 65 and the sidewallsof the storage node contact holes 62. Dielectric structures constitutedby the air gaps 66 and the spacers 63 are formed between the storagenode contact plugs 74 and the bit line structures 60. The air gaps 66are capped by the barrier patterns 71.

In an alternative embodiment, the air gaps 66 and the ohmic contactlayer 70 may be capped using only the second plugs 73.

Referring to FIG. 12I, storage nodes 75 are formed on the storage nodecontact plugs 74. While not shown, a dielectric layer and plate nodesmay be formed on the storage nodes 75. The storage nodes 75 have apillar shape and may have a cylinder shape in an alternative embodiment.

The semiconductor devices according to the exemplary embodiments may beapplied to a dynamic random access memory (DRAM), without a limitingsense, and may also be limited to a memory such as a static RAM (SRAM),a flash memory, a ferroelectric RAM (FeRAM), a magnetic RAM (MRAM) and aphase change RAM (PRAM).

FIG. 13 is a schematic diagram illustrating an exemplary memory card.

Referring to FIG. 13, the memory card 400 may include a controller 410and a memory 420. The controller 410 and the memory 420 may exchangeelectric signals. For example, the memory 420 and the controller 410 mayexchange data in response to a command from the controller 410.Accordingly, the memory card 400 may store data in the memory 420, oroutput data from the memory 420 to the outside of the memory 420. Thememory 420 may include the semiconductor device with the air gapsdescribed above. The memory card 400 may be used as data storage mediaof various portable appliances. For example, the memory card 400 mayinclude a memory stick card, a smart media card (SM), a secure digital(SD), a mini secure digital card (mini SD), or a multimedia card (MMC).

FIG. 14 is a block diagram illustrating an exemplary electronic system.

Referring to FIG. 14, the electronic system 500 may include a processor510, an input/output device 530, and a chip 520 which may perform datacommunication through a bus 540. The processor 510 may serve to executea program and control the electronic system 500. The input/output device530 may be used in inputting and outputting data to and from theelectronic system. The electronic system 500 may be connected with anexternal device, for example, a personal computer or a network, and mayexchange data with the external device through the input/output device530. The chip 520 may store codes and data for operations of theprocessor 510, and may perform some operations assigned by the processor510. For example, the chip 520 may include the semiconductor device withthe air gaps described above. The electronic system 500 may comprisevarious electronic control apparatuses which need the chip 520, and maybe used, for example, in a mobile phone, an MP3 player, a navigator, asolid state disk (SSD), a household appliance, etc.

Although various embodiments have been described for illustrativepurposes, it will be apparent to those skilled in the art that variouschanges and modifications may be made without departing from the spiritand scope of the invention as defined in the following claims.

What is claimed is:
 1. A semiconductor device comprising: a dielectricstructure which has an opening exposing a surface of a substrate; and aconductive structure which is formed in the opening, wherein theconductive structure comprises: a first conductive pattern recessed inthe opening; a second conductive pattern covering a top surface andsidewalls of the first conductive pattern; an air gap defined betweensidewalls of the opening and the second conductive pattern; and a thirdconductive pattern capping the second conductive pattern and the airgap.
 2. The semiconductor device according to claim 1, wherein theconductive structure comprises a plug.
 3. The semiconductor deviceaccording to claim 1, wherein the second conductive pattern comprisesmetal silicide.
 4. The semiconductor device according to claim 1,wherein the first conductive pattern comprises a silicon-containingmaterial, the third conductive pattern comprises a metal-containingmaterial, and the second conductive pattern comprises metal silicide. 5.The semiconductor device according to claim 1, further comprising: abarrier pattern formed between the third conductive pattern and thesecond conductive pattern, and capping the air gap and the secondconductive pattern; and a glue pattern formed over the barrier pattern.6. The semiconductor device according to claim 5, wherein the barrierpattern covers a top surface and sidewalls of an upper portion of thesecond conductive pattern.
 7. The semiconductor device according toclaim 1, further comprising: a capacitor coupled to the conductivestructure; and a plurality of bit line structures coupled to thesubstrate, wherein the opening is defined between the plurality of bitline structures, and the first conductive pattern and the secondconductive pattern are separated from the bit line structures by the airgap.
 8. The semiconductor device according to claim 1, furthercomprising: a buried gate type transistor having a gate electrode whichis buried in the substrate, wherein the conductive structure is coupledto a source region or a drain region of the buried gate type transistor.